Low Magnification Semiconductor
Autofocus System AOI

With the booming development of industries such as smart terminals, wireless communication and network infrastructure, smart driving, cloud computing, and smart healthcare, the critical size of advanced integrated circuits has further shrunk to sub-10nm scale, and the identification, localization, and classification of fabrication defects on patterned wafers have become increasingly challenging. And the low magnification semiconductor autofocus system of DZOPTICS is just able to correspond to a series of problems on wafers.